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发明名称
摘要
申请公布号
JP4324632(B2)
申请公布日期
2009.09.02
申请号
JP20080080913
申请日期
2008.03.26
申请人
发明人
分类号
H01L21/205;C23C16/24;H01L21/3065
主分类号
H01L21/205
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