Multi-axis lens, beam system making use of the compound lens, and method of manufacturing the compound lens

摘要

The invention provides a lens system for a plurality of charged particle beams. Therein, at least one common excitation coil (106a,b) for at least two lens modules is provided. The lens modules comprise a first pole piece, a second pole piece and at least two openings (22) for charged particle beams along optical axes (24). The lens modules constitute a component and share the excitation coil. Thereby, raw material availability, processing of work pieces and symmetry conditions for the lens fields are improved.