发明名称 |
TI and W containing transparent oxide electrode film |
摘要 |
A transparent oxide electrode film is provided to have crystalline indium oxide as its main component in which the indium in the indium oxide is substituted with titanium at a titanium/indium atomic ratio between 0.003 and 0.120, and the resistivity of the transparent oxide electrode film is 5.7x10-4 Omegacm or less, so as to provide excellent transmittance for both the visible light region and the infrared light region, and low resistivity.
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申请公布号 |
US7575698(B2) |
申请公布日期 |
2009.08.18 |
申请号 |
US20080345934 |
申请日期 |
2008.12.30 |
申请人 |
SUMITOMO METAL MINING CO., LTD. |
发明人 |
ABE YOSHIYUKI;ISHIYAMA NORIKO |
分类号 |
C23C14/08;H01B1/08;C03C17/245;C03C17/34;C23C14/06;H01B5/14;H01B13/00;H01L31/00;H01L31/0224;H01L31/04;H01L31/10 |
主分类号 |
C23C14/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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