| 摘要 |
There is provided an electron microscopic method capable of realizing a high resolution based on the principle of the phase retrieval method. An electron microscope (10) using the method is a device dedicated to the phase retrieval method in which hardware (incident system (100), a sample system (200), a detection system (300), a computer system (400)) and software (constriction condition, optimization method) are formed into a unitary block. The intensity distribution and the phase distribution of the support slit (210) are given as a real space constriction condition. The detection system (300) includes a course system having an objective lens (310) and a course detector (320) and a fine system has a fine detector (330). The course image is acquired by electrically turning on the objective lens. After acquiring the diffraction pattern by electrically turning off the objective lens, the fine image is reconfigured by the phase retrieval method using the obtained course image and diffraction pattern.
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