发明名称 One-dimensional phase contrast microscopy with a traveling lens generated by a step function change
摘要 A method for imaging a surface includes generating a traveling lens in an acousto-optic material and incorporating a traveling mask into a portion of the traveling lens so as to produce a composite traveling lens. The method further includes irradiating the composite traveling lens so as to produce a composite focused beam having a spatial variation across the composite focused beam. The composite focused beam is directed onto a region of the surface so as to generate radiation characteristic of the region from the region. The radiation is imaged onto a detector so as to generate a signal characteristic of the region, responsively to the spatial variation.
申请公布号 US7576348(B2) 申请公布日期 2009.08.18
申请号 US20070853329 申请日期 2007.09.11
申请人 APPLIED MATERIALS, ISRAEL, LTD. 发明人 FELDMAN HAIM;MESHULACH DORON;ANGEL EYAL
分类号 G01N21/88 主分类号 G01N21/88
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