发明名称 |
Method and equipment for simulation |
摘要 |
The simulation equipment has division unit for dividing a layout of a photo mask (mask layout) into a plurality of areas, average light intensity value calculation unit for calculating an average value of light intensity in each of the areas, smoothing unit for subjecting the calculated average value to smoothing processing, and multiplication unit for multiplying the smoothed average value by a predetermined multiplier. |
申请公布号 |
US7577556(B2) |
申请公布日期 |
2009.08.18 |
申请号 |
US20040782821 |
申请日期 |
2004.02.23 |
申请人 |
FUJITSU MICROELECTRONICS LIMITED |
发明人 |
FUTATSUYA HIROKI;ASAI SATORU |
分类号 |
G03F1/08;G06G7/48;G03F1/14;G03F1/36;G03F1/68;G06F17/50;G06G7/62;G06K9/00;H01L21/027 |
主分类号 |
G03F1/08 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|