发明名称 Method for forming buried contact electrode of semiconductor device having pn junction and optoelectronic semiconductor device using the same
摘要 Disclosed is a method for manufacturing an optoelectronic semiconductor device having a p-n junction diode, which includes the steps of: (a) etching at least one surface of the p-n junction diode in a depth direction to form a plurality of continuous, isolated or mixed type electrode pattern grooves with a certain array; and (b) filling the formed grooves with a conductive ink containing a transparent conducting particle through an inkjet and then performing heat treatment to form a buried transparent electrode, the optoelectronic semiconductor device, and an apparatus for manufacturing the optoelectronic semiconductor device. In the present invention, covering loss is significantly reduced due to a buried transparent electrode so that the high efficiency of photoelectric conversion can be implemented, and there can be provided the easiness of a manufacturing process and the enhancement of productivity through the unification of etching and electrode forming processes.
申请公布号 US7576008(B2) 申请公布日期 2009.08.18
申请号 US20060526690 申请日期 2006.09.26
申请人 LG CHEM LTD. 发明人 KIM TAE SU;SHIN BU GON;YOU JAE SUNG;SHIN HYUN WOO
分类号 H01L21/311 主分类号 H01L21/311
代理机构 代理人
主权项
地址