| 摘要 |
A plane grinding device of a substrate is provided to reduce the grinding work time by elevating a fixed plate using a fixed plate elevator. A plane grinding device of a substrate comprises a fixed plate elevator(7), a grinding head(1), a rotation / translation cam complex actuator, a fixing plate(6), and a work chuck rotary table(2). The grinding head supports a cup-wheel-shaped grindstone with a hydrostatic bearing and a magnetic bearing. The rotation / translation cam complex actuator rotates and moves the grindstone axis. The work chuck rotary table arranges the horizontal direction surface of a porous ceramic rotary chuck table to be in a row with the bottom surface of the cup-wheel-shaped grindstone. The fixed plate elevator comprises kinematic couplings(73,83) and a cylinder rod(72).
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