发明名称 |
Methods to make piezoelectric ceramic thick film array and single elements with a reusable single layer substrate structure |
摘要 |
A method of producing at least one piezoelectric element includes depositing a piezoelectric ceramic material onto a surface of a first substrate to form at least one piezoelectric element structure. Then an electrode is deposited on a surface of the at least one piezoelectric element structure. Next, the at least one piezoelectric element structure is bonded to a second substrate, the second substrate being conductive or having a conductive layer. The first substrate is then removed from the at least one piezoelectric element structure and a second side electrode is deposited on a second surface of the at least one piezoelectric element structure. A poling operation is performed to provide the at least one piezoelectric element structure with piezoelectric characteristics.
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申请公布号 |
US7574787(B2) |
申请公布日期 |
2009.08.18 |
申请号 |
US20060363849 |
申请日期 |
2006.02.28 |
申请人 |
PALO ALTO RESEARCH CENTER INCORPORATED |
发明人 |
XU BAOMIN;BUHLER STEVEN A.;WELSBERG MICHAEL C.;WONG WILLIAM S.;SOLBERG SCOTT E.;LITTAU KARL A.;FITCH JOHN S.;ELROD SCOTT A. |
分类号 |
H04R17/00;B41J2/16;H01L41/24 |
主分类号 |
H04R17/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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