发明名称 Cyclic error compensation in interferometry systems
摘要 A first portion of a beam including a first frequency component is directed along a first path. A second portion of the beam is frequency shifted to generate a shifted beam that includes a second frequency component different from the first frequency component and one or more spurious frequency components different from the first frequency component. At least a portion of the shifted beam is directed along a second path different from the first path. An interference signal S(t) from interference between the beam portions directed along the different paths is measured. The signal S(t) is indicative of changes in an optical path difference n{tilde over (L)}(t) between the paths, where n is an average refractive index along the paths, {tilde over (L)}(t) is a total physical path difference between the paths, and t is time. An error signal is provided to reduce errors in an estimate of {tilde over (L)}(t) that are caused by at least one of the spurious frequency components of the shifted beam, the error signal being derived at least in part based on the signal S(t).
申请公布号 US7576868(B2) 申请公布日期 2009.08.18
申请号 US20070760535 申请日期 2007.06.08
申请人 ZYGO CORPORATION 发明人 DEMAREST FRANK C.
分类号 G01B11/02 主分类号 G01B11/02
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