REDUCED PRESSURE DRYING APPARATUS

摘要

A reduced pressure drying apparatus shortening a processing time is provided to prevent the generation of a low temperature unit which causes dewing internal of a chamber or an exhaust pipe. An exhaust pipe(32) is connected to an upper part of chamber(12) and a chamber lower unit(14). A reduced pressure pump reduces an upper part of chamber and a lower part of pressure through the exhaust pipe. A partition sheet member forms an exhaust pipe connecting with the exhaust pipe. A hot air generator and a hot air guide pipe supply the hot air in the space closed by the partition seat member.