| 摘要 |
PROBLEM TO BE SOLVED: To balance out an inertia force in a superior manner, at all times, even if a scanning probe device is used repeatedly, while replacing a sample holding stand or a probe, and to suppress vibration. SOLUTION: This scanning probe device comprises a probe and a scanning stage 400, and acquires the information on a sample or processes the sample, while relatively moving the probe and the scanning stage. The scanning stage comprises a sample-holding stand for holding the sample, a driving element for moving the sample-holding stand, and a driving element support 402 for supporting the driving element. The driving element includes a first driving element, a second driving element, and a third driving element. One end of the second driving element 404 is joined to the center section of the first driving element 403, one end of the third driving element 405 is joined to the center of the second driving element, a balance weight member 409 is joined to the other end of the second driving element, and the scanning stage is integrally constituted to be replaceable, with respect to the device body. COPYRIGHT: (C)2009,JPO&INPIT
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