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发明名称
Chemisch-mechanisches Polieren für die Planarisierung isolierender Dielektrika
摘要
申请公布号
DE69840889(D1)
申请公布日期
2009.07.23
申请号
DE19986040889
申请日期
1998.12.22
申请人
TEXAS INSTRUMENTS INC.
发明人
OLSEN, LEIF C.;SWANSON, LELAND S.;EDWARDS, HENRY L.
分类号
H01L21/304;H01L21/3105;H01L21/3065;H01L21/762;H01L21/768
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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