发明名称 FILAMENT HOLDING STRUCTURE AND ION SOURCE HAVING THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a filament holding structure suppressing a reduction in clamping force even at a high temperature, readily regenerating the clamping force with excellent work efficiency in filament holding and position adjustment. SOLUTION: The filament holding structure has a filament conductor 90 having a filament hole 96 through which a filament 50 passes and a fulcrum member hole 98 through which a fulcrum member 110 passes in each of corresponding positions in two parts interposing a groove and branched in a sheet thickness direction of the filament conductor, a filament clamper 100 having a filament hole through which the filament passes and a fulcrum member hole through which the fulcrum member passes in a part 102 of the filament clamper positioned in the groove, the fulcrum member inserted into the holes, and a bolt 112 and a nut 114. The filament is inserted into the filament holes in the filament conductor 90 and the filament clamper, the filament clamper is clamped with the bolt and nut and force is applied to the filament in a shearing direction to hold it on the filament conductor 90. COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2009163985(A) 申请公布日期 2009.07.23
申请号 JP20080000611 申请日期 2008.01.07
申请人 NISSIN ION EQUIPMENT CO LTD 发明人 MIYABAYASHI KENJI
分类号 H01J27/02;H01J37/08 主分类号 H01J27/02
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