| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical scanner capable of improving detection precision with which an amplitude of a mirror portion on a swinging axis is detected. SOLUTION: On a thin and long rectangular silicon base material having thickness of 30 to 200μm, a body portion 2 is formed which comprises a fixed frame 6, a reflecting mirror portion 8, mirror side plate spring portions 17A and 17B constituting beam portions 16A and 16B, connection portions 20A and 20B, and frame side leaf spring portions 18A to 18D. Lower electrodes 21A and 21B and upper electrodes 23A and 23B stacked across the piezoelectric element 22A of the body portion 2 are divided on the fixed frame 6 along the swinging axis 15 and stacked. Lower electrodes 21C and 21D and upper electrodes 23C and 23D stacked across a piezoelectric element 22B are divided on the fixed frame 6 along the swinging axis 15 and stacked. COPYRIGHT: (C)2009,JPO&INPIT
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