| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To form laser beam to be irradiated with its power density being increased by adding laser beams emitted from a plurality of laser beam sources by using a DOE (Diffractive Optical Element). <P>SOLUTION: A laser beam irradiating method includes a step of reflecting the first laser beam in the direction parallel to the first direction by a first reflecting mirror at the first position, and allowing it to be advanced as a divergent beam, a step of reflecting the second laser beam in the direction parallel to the first direction by a second reflecting mirror at the second position in a vicinity of the first position, and allowing it to be advanced as a divergent beam, a step of allowing the third laser beam to be advanced as the divergent beam parallel to the first direction through a space between the first and second reflecting mirrors, a step of forming a parallel beam by receiving the synthesized beam of the first, second and third laser beams advancing in the first direction with overlap, and a step of generating the diffraction by allowing the parallel beam to be incident on a diffractive optical element. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
