摘要 |
PROBLEM TO BE SOLVED: To provide a coating-nozzle inspection apparatus which inspects whether a large number of fine coating liquid amounts formed in a coating nozzle are suitable, to be able to estimate suitability of a discharge amount, in an inspection method of the coating nozzle using for coating of a fluorescent material and a pigment material of a display device. SOLUTION: While a liquid is continuously discharged from a discharge opening 92 to form a column-like flow, light is cast 35, 36 to the column-like flow to measure the brightness of transmitted light. As the state of the transmitted light changes according to the diameter of the column-like flow, the difference of discharge amounts can be inspected by treating obtained information of the brightness. COPYRIGHT: (C)2009,JPO&INPIT
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