发明名称 LAMINATED SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a multilayer type semiconductor device having enhanced dissipation efficiency of heat generated on respective substrates. SOLUTION: The multilayer type semiconductor device has a plurality of semiconductor chips 12 stacked at intervals, wherein thermally conductive members 16 for improving thermal conductivity between the semiconductor chips 12 are disposed between the semiconductor chips 12. COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2009164152(A) 申请公布日期 2009.07.23
申请号 JP20070339005 申请日期 2007.12.28
申请人 NIKON CORP 发明人 TAKI YUSUKE;SUGAYA ISAO;AOKI GIICHI
分类号 H01L25/065;H01L25/07;H01L25/18 主分类号 H01L25/065
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