REDUCED-PRESSURE HEATER, ITS HEATING METHOD, AND ELECTRONIC PRODUCT MANUFACTURING METHOD

摘要

An object is heated to a preheating temperature in an atmosphere of a reducing gas under the atmospheric pressure while adjusting the setting of the emissivity of a noncontact temperature measuring section and regulating the temperature of the object according to the measured value measured by a contact temperature measuring section (time t0 to time t1). The pressure of the atmosphere is reduced (time t1 to time t2). The object is further heated to a heating temperature under a reduced pressure while regulating the temperature of the object according to the measured value measured by the noncontact temperature measuring section whose setting of the emissivity is adjusted during the heating process to the preheating temperature (time t2 to time t5). The pressure of the atmosphere is increased back to the atmospheric pressure while maintaining the heating temperature of the object (time t5 to time t6). The temperature of the object is decreased under the atmospheric pressure (time t6 to time t7). With this, in the process of heating an object under a reduced pressure, the actual temperature of the object is managed over the whole steps, and the object can be most suitably heated according to the actual temperature.