发明名称 SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To suppress formation of a void as a connection defect caused by trapping of a gas in a connection layer by eliminating the need of working, such as, grooving on the reverse surface of a semiconductor element, even when a semiconductor is connected using a conductive adhesive producing an extremely large amount of gas. <P>SOLUTION: A connection layer for connecting the semiconductor element 1 and a base material 2c has a laminated structure of an air gap layer 13 and a bonding layer 7, and consequently, a gas can be dissipated efficiently d to the outside of the connection layer in a process of connection. <P>COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2009164208(A) 申请公布日期 2009.07.23
申请号 JP20070339952 申请日期 2007.12.28
申请人 MITSUBISHI ELECTRIC CORP 发明人 IDETA GORO;SUGANUMA KATSUAKI;KIM KEUNSOO;KIM DOSEOP
分类号 H01L21/52 主分类号 H01L21/52
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