| 摘要 |
PROBLEM TO BE SOLVED: To provide a probe card capable of preventing buckling of a probe pin formed by arranging vertical-type cantilevers in a circular form at equal intervals, when it is brought into contact with a ball type electrode. SOLUTION: In this probe card 1A, a plurality of probe pins 3A are arranged in an array form on the surface 2a of a wiring board 2. The probe pin 3A is formed by arranging at equal intervals on a virtual circle VC, three or more vertical type cantilevers 4A to be in contact with the ball type electrode. The vertical type cantilever 4A has an inner peripheral surface 7, comprising a lower reference surface 6 on the wiring board 2 side and an upper inclined surface 5 on the ball type electrode side. In addition, the upper inclined surface 5 is tilted to the outside so that an intersection line L between the lower reference surface 6, and the upper inclined surface 5 is tilted with respect to a compression direction of the ball type electrode. COPYRIGHT: (C)2009,JPO&INPIT
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