| 摘要 |
PROBLEM TO BE SOLVED: To provide a field emission type electron source device achieving alignment by detecting and adjusting the inclination of a grid electrode without using an elaborate inclination detecting and measuring device. SOLUTION: The field emission type electron source device includes a semiconductor substrate with an electron source array formed, the grid electrode with a through-hole array disposed above the electron source array corresponding to the electron source array, and an inclination detecting through-hole formed through the grid electrode around the through-hole array and having different light reflectance between a surface and an inner wall. COPYRIGHT: (C)2009,JPO&INPIT
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