发明名称 POSITIVE PHOTOSENSITIVE COMPOSITION, AND ORGANIC FILM COMPRISING THE SAME
摘要 <P>PROBLEM TO BE SOLVED: To provide: copolymers useful for forming a patterned organic film excellent in high solvent-proofenss, high water-proofness, high acid-proofness, high alkali-proofness, high heat resistance, high transparency and adhesiveness to a substrate, and obtained by developing with aqueous alkaline solution; a positive photosensitive composition containing the same; and the organic film comprising the same. <P>SOLUTION: The positive photosensitive composition contains: the copolymer of a radical polymerizable specified vinyl ketone phenol and other radical polymerizable monomer; the copolymer of a radical polymerizable monomer containing a carboxylic acid or carboxylic anhydride; and other radical polymerizable monomer, and a quinone azide compound. The organic film comprising the composition is also disclosed. <P>COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2009163093(A) 申请公布日期 2009.07.23
申请号 JP20080001976 申请日期 2008.01.09
申请人 CHISSO CORP 发明人 WATANABE EIJI;ITAMI SETSUO;KIMURA YUKI;SATO HIROYUKI
分类号 G03F7/023;C08F216/36;C08F220/06;H01L21/027 主分类号 G03F7/023
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