发明名称 METHOD OF FORMING CONDUCTION SEPARATING PORTION OF TRANSPARENT CONDUCTIVE OXIDE FILM, AND MULTI-JUNCTION PHOTOELECTRIC CONVERSION DEVICE MANUFACTURED BY USING THE SAME
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a method of forming a conduction separating portion of a transparent conductive oxide film in which a decrease in power generation efficiency can be suppressed by dividing an intermediate contact layer without affecting a base layer and suppressing a current leak from the intermediate contact layer. <P>SOLUTION: Disclosed is the method of forming the conduction separating portion of the transparent conductive oxide film in which the conduction separating portion is formed on the transparent conductive oxide film forming the intermediate contact layer 11 of a thin-film solar cell module 1, the method being characterized in that an etchant for etching the transparent conductive oxide film is jetted in fine droplets by an ink jetting method to adhere to a position of the transparent conductive oxide film where an intermediate separating groove 23 is formed. <P>COPYRIGHT: (C)2009,JPO&INPIT</p>
申请公布号 JP2009164250(A) 申请公布日期 2009.07.23
申请号 JP20070340365 申请日期 2007.12.28
申请人 MITSUBISHI HEAVY IND LTD 发明人 UDA KAZUTAKA;SASAGAWA EISHIRO
分类号 H01L31/04 主分类号 H01L31/04
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