MICROSCOPE SYSTEM AND ITS CONTROL METHOD

摘要

PROBLEM TO BE SOLVED: To easily decide an optimum correction amount of an aberration correction lens. SOLUTION: A microscope system is equipped with: a sample observed or imaged through a transparent sample holding member; an objective lens equipped with the aberration correction lens for correcting a thickness error; a means for moving the aberration correction lens; a motor-driven focusing part for changing an interval; an imaging lens for obtaining the microscopic image of the sample with the objective lens; a CCD arranged on an imaging surface; a means for taking the microscopic image of the sample every time the aberration correction lens is moved at a predetermined interval after focusing by the motor-driven focusing part and displaying a plurality of obtained photographic images on a monitor screen side by side; a storage circuit for storing position data showing the position of the aberration correction lens on the microscopic image of the sample related to the photographic image; a means for selecting an optional photographic image from the plurality of displayed photographic images; and a means for reading out the position data of the aberration correction lens on the selected photographic image from the storage circuit and moving the aberration correction lens to a position shown by the position data. COPYRIGHT: (C)2009,JPO&INPIT