| 摘要 |
PROBLEM TO BE SOLVED: To provide a driving apparatus unfailingly transmitting a driving force to an object to be driven even if a force receiving portion of the object is deviated from a correct position, and to provide a substrate transfer system using the same. SOLUTION: The driving apparatus 20 supplies a rotational driving force from the outside to the force receiving position of the object which has closely stopped. The driving apparatus 20 includes: an engaging section engaging with the force receiving section; a core alignment section coupled to the engaging section; an advancing/retracting section for advancing and retracting the engaging section and the core alignment section to the object; and a rotating section rotating the engaging section and the core alignment section around a shaft parallel to the moving forward/backward direction. COPYRIGHT: (C)2009,JPO&INPIT
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