MULTI-DIRECTIONAL SCANNING OF MOVABLE MEMBER AND ION BEAM MONITORING ARRANGEMENT THEREFOR

摘要

PROBLEM TO BE SOLVED: To provide a vacuum seal structure used to scan a wafer holder mechanically in an ion implanter. SOLUTION: Semiconductor processing apparatus is disclosed which provides for movement of a scanning arm 60 of the wafer holder 180, in two orthogonal directions (X and Y directions). A sliding member or sledge is movable in a reciprocating manner in the Y direction relative to the rotor plate 50 which is attached to a vacuum chamber wall. The arm 60 is reciprocated by linear motors 90A, B in the X direction. The arm 60 is supported in a cantilever manner relative to a slide 100 using gimballed air bearings. A feedthrough 130 then acts as a vacuum seal and guide for sliding. COPYRIGHT: (C)2009,JPO&INPIT