| 摘要 |
PROBLEM TO BE SOLVED: To provide an X-ray inspection device having high image quality by reducing deviation due to changes in aging in an X-ray focus point of a micro focus X-ray tube. SOLUTION: This device comprises an electron gun 114 stored in a vessel being kept in a vacuum state; a target 115, arranged at one end part of the advancing direction side of the electron generated from the electron gun 114; an X-ray tube 11a for generating the X-ray 3 from the X-ray focus point F of the target 115 by applying high voltage on the electron gun 114 and the target 115; an X-ray detector 13 for detecting the X-ray irradiated from the X-ray tube 11a and passed through an inspection object 2; a projection piece 117, arranged at the outer circumference of the vessel in the vicinity of the target 115; a rail 16 for supporting the X-ray tube 11a to be slidable in the direction where the X-ray focus point F is on one end; and a support base 14, equipped with a lock part 141 locking the projection piece 117 at a position closer to the target 115 than to the rail 16 to support the X-ray tube 11a at a predetermined position. COPYRIGHT: (C)2009,JPO&INPIT
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