| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for observing a minute distortion in a minute zone, and measuring its thermal expansion coefficient, and to provide an apparatus used for it. SOLUTION: A technology and its apparatus measure a thermal deformation generated in a member by using an electron beam moire method, a heater C1 and an energization apparatus, measure the thermally-generated distortion from a measurement result, and measure the thermal expansion coefficient from the distortion. The apparatus for observing an electron beam moire stripe, a CCD moire stripe, an optical moire stripe, a scanning laser moire stripe and an interference stripe is combined with the apparatus for heating the entire member and the apparatus for energizing the component. The thermal deformation is measured from a change in the moire stripe before and after heating. The method and its apparatus calculate the thermal expansion coefficient from the result. COPYRIGHT: (C)2009,JPO&INPIT |
