| 摘要 |
PROBLEM TO BE SOLVED: To provide a liquid droplet ejecting apparatus excellent in ejection state of liquid droplets without coating liquid leakage at a head part. SOLUTION: The apparatus comprises a main tank 6, a sub tank 7, a head part 4, coating liquid supplying pipe 20 for supplying coating liquid in the main tank 6 to the head part 4, a coating liquid recovering pipe 22 for returning the coating liquid discharged from the head part 4 to the sub tank 7, a between-tank transfer pipe 13 for transferring the coating liquid in the sub tank 7 to the main tank 6, a between-tank transfer pump 14 provided on the way of the between-tank transfer pipe 13, main tank pressure reduction means 9, 11 for reducing the pressure in the main tank, and sub tank pressure reduction means 16, 17 for reducing the pressure in the sub tank. An atmosphere introducing hole 97, a flow volume adjusting valve 98, and an atmosphere take-in filter 99, which are configured so as to be able to take the atmosphere into the sub tank, are provided, and the apparatus is so configured that it can be opened and closed by an atmosphere take-in valve 100. COPYRIGHT: (C)2009,JPO&INPIT
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