发明名称 COLORED NEGATIVE PHOTORESIST COMPOSITION, COLORED PATTERN COMPRISING THE SAME, AND METHOD FOR PRODUCING THE COLORED PATTERN
摘要 The present invention relates to a colored negative photoresist composition comprising a coloring agent (A), an alkali soluble binder polymer (B), a photopolymerizable compound (C), a photopolymerization initiator (D), and a solvent (E), wherein the alkali soluble binder polymer (B) is a polymer comprising the monomer represented by the following Formula 1 and a monomer having a carboxyl group. The colored negative photoresist composition of the present invention improves adhesion to a silicone wafer, in particular, an SiN wafer, to prevent a separation or tear in the lining, and to form a rectangular pattern, thereby being able to be effectively used in a complementary metal oxide semiconductor.
申请公布号 US2009185059(A1) 申请公布日期 2009.07.23
申请号 US20070302773 申请日期 2007.05.25
申请人 DONG-WOO FINE-CHEM. CO., LTD. 发明人 KIM SEONG HYEON;LEE SEUNG NO;KIM SANG TAE
分类号 H04N5/335;G02F1/1335;G03F1/00;G03F7/004;G03F7/20 主分类号 H04N5/335
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