SUBSTRATE TREATMENT APPARATUS

摘要

PROBLEM TO BE SOLVED: To perform a uniform and efficient treatment by a substrate treatment apparatus targeting a large-area substrate treatment using a treating liquid.

SOLUTION: The substrate treatment apparatus, which treats a substrate mounted on a conveying table while conveying the substrate, includes: a suction unit for sucking the treating liquid; and a blocking unit for blocking the treating liquid in this order from upstream to downstream in the conveyance direction of the substrate. Further, a cleaning unit having a brush for brushing a surface of the substrate can be disposed upstream. The cleaning unit comprises a plurality of brush units whose positions can be adjusted independently of each other.

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