METHOD FOR PRODUCING A LAMINATED BODY HAVING A1-BASED GROUP-III NITRIDE SINGLE CRYSTAL LAYER, LAMINATED BODY PRODUCED BY THE METHOD, METHOD FOR PRODUCING A1-BASED GROUP-III NITRIDE SINGLE CRYSTAL SUBSTRATE EMPLOYING THE LAMINATED BODY, AND ALUMINUM NITRIDE SINGLE CRYSTAL SUBSTRATE

摘要

Disclosed is a process for producing a laminate, comprising (1) the step of providing a base substrate having a surface formed of a single crystal of a material different from a material for constituting an Al-based group III nitride single crystal layer to be formed, (2) the step of forming an Al-based group III nitride single crystal layer having a thickness of 10 nm to 1.5 µm on the single crystal plane of the provided base substrate, (3) the step of forming a non-single crystal layer having a thickness of not less than 100 times the thickness of the Al-based group III nitride single crystal layer on the Al-based group III nitride single crystal layer without breaking the Al-based group III nitride single crystal layer, and (4) the step of removing the base substrate. The production process can provide a substrate that is suitable for use as a base substrate for the production of a self-supporting substrate of an Al-based group III nitride single crystal, has a surface formed of a single crystal of an Al-based group III nitride, and is free from cracking and warpage.