| 摘要 |
<P>PROBLEM TO BE SOLVED: To surely and accurately detect displacement of a nozzle distal end due to eccentric displacement of a nozzle shaft and engagement displacement of a suction nozzle with respect to the nozzle shaft. <P>SOLUTION: The method for correcting head movement position includes: a step of imaging the nozzle shaft at a plurality of rotation angles from the lower part with the suction nozzle detached from the nozzle shaft to detect the position of the distal end part of the nozzle shaft at the plurality of rotation angles based on the image; a step of imaging the suction nozzle at two rotation angles from the side with the suction nozzle attached to the nozzle shaft to detect one directional component of the amount of eccentricity at the nozzle distal end based on the image; a step of computing the amount of eccentricity of the nozzle distal end at a plurality of the rotation angles from data detected in these steps; and a step of correcting the movement position of the suction nozzle at the time of sucking the component by the amount of eccentricity of the nozzle distal end. <P>COPYRIGHT: (C)2009,JPO&INPIT |
