发明名称 METHOD TO ENHANCE PERFORMANCE OF COMPLEX METAL OXIDE PROGRAMMABLE MEMORY
摘要 A method of incorporating oxygen vacancies near an electrode/oxide interface region of a complex metal oxide programmable memory cell which includes forming a first electrode of a metallic material which remains metallic upon oxidation, forming a second electrode facing the first electrode, forming an oxide layer in between the first and second electrodes, applying an electrical signal to the first electrode such that oxygen ions from the oxide layer are embedded in and oxidize the first electrode, and forming oxygen vacancies near the electrode/oxide interface region of the complex metal oxide programmable memory cell.
申请公布号 US2009186443(A1) 申请公布日期 2009.07.23
申请号 US20080017848 申请日期 2008.01.22
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 JOSEPH ERIC A.;LAM CHUNG HON;MEIJER GERHARD I.;ROSSNAGEL STEPHEN M.;SCHROTT ALEJANDRO GABRIEL
分类号 H01L21/34 主分类号 H01L21/34
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