| 摘要 |
<p>A substrate transport device comprises a first transport means which transports a substrate horizontally in a first transport direction and a second transport means which transports the substrate horizontally in a second transport direction orthogonal to the first transport direction. The first transport means is composed of a plurality of lines of first transport units separated from one another in the first transport direction. The second transport means is composed of a plurality of second transport units separated from one another in the second transport direction. Each second transport unit comprises a supporting unit which is disposed in a gap between the first transport units to support the substrate from its lower side, a vertical movement unit which is disposed under the supporting unit to vertically move the supporting unit, and a drive unit which is disposed below the first transport unit to move the supporting unit and the vertical movement unit in the second transport direction.</p> |
