| 摘要 |
PROBLEM TO BE SOLVED: To develop a monolithic independent addressable laser array for providing electric and optical confinement and accurately having an accurately defined and controlled oxide region. SOLUTION: Each of edge emitting lasers of an array 100 of the edge emitting lasers includes: a substrate; a plurality of semiconductor layers formed on the substrate; one or one and more of the plurality of the semiconductor layers forming an active region; a waveguide 214 formed from the semiconductor layer on the active region wherein the waveguide 214 provides optical confinement in light emission from the active region, the waveguide 214 is defined by a natural oxide layer 212 formed on grooves 210, the grooves 210 are formed in the plurality of the semiconductor layers and the waveguide 214 extends downward to the side of the waveguide 214 formed from semiconductors; the natural oxide layer 212 giving electric separation to the adjacent edge emitting laser in the array; and a first electrode and a second electrode enabling bias of the active region. COPYRIGHT: (C)2009,JPO&INPIT
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