LAYER TRANSFER WITH REDUCTION OF POST-FRACTURE ROUGHNESS

摘要

The invention provides a method of transferring a layer of a donor substrate onto a receiving substrate, the method comprising : a first step (S10) for hydrogen ions into the donor substrate intended to form a layer of microcavities or platelets; a secondstep (S12) of implanting ions; a step (S13) for bonding the face of the donor substrate with a face of the receiving substrate; a step (S14) for detachment to cause splitting at the layer of microcavities or platelets formed in the donor substrate. The method further comprises, between the two implantation steps, a step (S11) for priming anneal heat treatment carried out at a temperature in the range 300°C to 700°C and for a duration that is less than 10% of the duration necessary to cause splitting at the layer of microcavities or platelets formed in the donor substrate at the temperature employed during said priming anneal heat treatment.