发明名称 METHOD OF PRODUCING PHOTOELECTRIC CONVERTING APPARATUS
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a method of producing a photoelectric converting apparatus including the steps of improving photoelectric converting performance and an annealing process that may be applied to a mass-producing system. <P>SOLUTION: The method of producing the photoelectric converting apparatus includes the step of conducting the annealing process for 30 minutes to six hours under the temperature of 150 to 200°C in the atmospheric condition to a photoelectric converting apparatus provided with a photoelectric converting layer including a crystalline silicon layer. <P>COPYRIGHT: (C)2009,JPO&INPIT</p>
申请公布号 JP2009164251(A) 申请公布日期 2009.07.23
申请号 JP20070340366 申请日期 2007.12.28
申请人 MITSUBISHI HEAVY IND LTD 发明人 NISHIMIYA TATSUYUKI;YAMAGUCHI KENGO;MIYAHARA HIROOMI
分类号 H01L31/04 主分类号 H01L31/04
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