| 摘要 |
PROBLEM TO BE SOLVED: To provide a tilt stage making it possible to adjust the angle of tilt of an object in three dimensions with a simple structure. SOLUTION: A first operating piece 8 is moved by a first linear actuator 4 in a perpendicular direction and a tilt table 2 tilts on a Y axis through an air film between a slide surface 2b and a support surface 3b. Further, a second operating piece 9 is moved by a second linear actuator 6 in a perpendicular direction and the tilt table 2 tilts on an X axis through an air film between the slide surface 2b and support surface 3b. Then an up and down movement of the first operating piece 8 and an up and down movement of the second operating piece 9 are combined to allow the tilt table 2 to tilt at various angles of tilt to a horizontal plane. COPYRIGHT: (C)2009,JPO&INPIT |
