| 摘要 |
PROBLEM TO BE SOLVED: To achieve a new method of inspecting an electronic component with a depressurized cavity having a functional element disposed therein that easily inspects and checks the depressurizing sealing state of the cavity during a manufacturing process. SOLUTION: The method of inspecting the electronic component includes a first depressurized cavity C1 having a functional element 12 in the inside. In this case, second cavities C3, C4 depressurized in a depressurizing sealing process common to that of at least the first cavity C1 are previously formed, and the bending state of covering portions 32C, 33C for covering the second cavities C3, C4 is detected from the outside. COPYRIGHT: (C)2009,JPO&INPIT
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