| 摘要 |
PROBLEM TO BE SOLVED: To enhance vibration damping performance of a vibration isolator without deteriorating vibration isolation performance for insulating external vibration as much as possible. SOLUTION: This vibration isolator 1 comprises a frame 12 to be loaded with a XY stage 9 of a precision instrument, frame support units 41 elastically supporting the frame 12 from a bottom side, and a damper unit 21 having an interlock mechanism 36, which comprises pushing members 23 to be displaced with displacement of the frame 12 supported by the frame support unit 41 so as to push a viscous elastic body 30, and a pushing force increasing mechanism 35 for increasing pushing force to be applied to the viscous elastic body 30 by amplifying the displacement amount of the pushing member 23. COPYRIGHT: (C)2009,JPO&INPIT
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