| 摘要 |
PROBLEM TO BE SOLVED: To improve a dimension accuracy of a cavity of a micro device formed by a joint part. SOLUTION: A first integral component having: a plate type substrate 110; and a joint part 100a including a resin membrane 108 joined to the substrate, and a spacer 106 made by inorganic material and coated by the resin membrane, is formed, and a third integral component having the cavity between the first integral component and a second integral component on upper and lower sides by thermally crimping the resin membrane 108 on both of the upper and lower sides of a body 120 that is the second integral component, is formed. A plurality of first integral members and a plurality of second integral members are integrally formed, respectively, and dicing is performed for the first integral members and the second integral members for each die after joining. Then each die is sealed off by a resin mold 140. COPYRIGHT: (C)2009,JPO&INPIT
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