| 摘要 |
PROBLEM TO BE SOLVED: To provide a control method of a robot hand capable of preventing an error due to difference in sensor response from being added and calculating a shift amount before a semiconductor wafer completely passes over the sensor, and a workpiece conveyance robot system. SOLUTION: Two sensors 301 and 302 for detecting different edges of a workpiece 10 are placed based on an alignment coordinate system for defining a reference position of the workpiece 10 in a conveyance path for conveying the workpiece 10 from a first position to a second position. When the workpiece 10 is conveyed from the first position to the second position, the different edges of the workpiece 10 are detected by means of the two sensors 301 and 302. The shift amount of the workpiece 10 from the reference position is calculated from detection signals output from the two sensors 301 and 302. The shift amount is converted into a robot coordinate system defining an operation track of a robot 100 to control the operation of the hand of the robot 100. COPYRIGHT: (C)2009,JPO&INPIT
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