发明名称 Interferometric measurement of DLC layer on magnetic head
摘要 An explicit relationship is developed between the ratio of average interferometric modulation produced by diamond-like carbon (DLC)-coated magnetic-head surfaces and the thickness of the DLC layer. Accordingly, the thickness of the DLC layer is calculated in various manners from modulation data acquired for the system using object surfaces of known optical parameters.
申请公布号 US2009185193(A1) 申请公布日期 2009.07.23
申请号 US20080009424 申请日期 2008.01.18
申请人 VEECO INSTRUMENTS, INC. 发明人 MUNTEANU FLORIN;CHEN DONG;NOVAK ERIK L.;BEST G. LAWRENCE
分类号 G01B11/02 主分类号 G01B11/02
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