发明名称 |
TRANSFER MECHANISM WITH MULTIPLE WAFER HANDLING CAPABILITY |
摘要 |
An integrated robotic mechanism is disclosed for improving transport equipment, integrating an object movement with other functionalities such as alignment or identification. The disclosed integrated robot assembly can comprise a multiple end effector for moving a plurality of workpieces, a single end effector for moving a single workpiece, a rotation chuck incorporated on the robot body to provide alignment capability, and an optional identification subsystem for identify the object during transport. The present invention robot assembly can be used in a sorter or stocker equipment, in processing equipment, and a transfer system. |
申请公布号 |
WO2009037675(A3) |
申请公布日期 |
2009.07.23 |
申请号 |
WO2008IB53827 |
申请日期 |
2008.09.22 |
申请人 |
DYNAMIC MICRO SYSTEMS;TABRIZI, FARZAD;BARKER, DAVID |
发明人 |
TABRIZI, FARZAD;BARKER, DAVID |
分类号 |
H01L21/677 |
主分类号 |
H01L21/677 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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