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发明名称
Auf kritischer Strömung basierender Massenströmungsnachweiser
摘要
申请公布号
DE112007001375(T5)
申请公布日期
2009.07.23
申请号
DE200711001375T
申请日期
2007.06.27
申请人
MKS INSTRUMENTS INC.
发明人
DING, JUNHUA;ZARKAR, KAVEH H.;SHAJLL, ALI;SMITH, DANIEL ALEXANDER
分类号
G01F25/00;G05D7/06
主分类号
G01F25/00
代理机构
代理人
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地址
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