PIEZOELECTRIC VIBRATION PIECE AND PIEZOELECTRIC DEVICE, AND MANUFACTURING METHOD THEREOF

摘要

PROBLEM TO BE SOLVED: To provide a piezoelectric vibration piece (20) for reducing the influence of vibration leakage or the like by extending the shaft length (SL) of a support arm (40).

SOLUTION: The piezoelectric vibration piece (20) mounted to a package (PKG1) has: a base part (29) that is formed by a piezoelectric material and is extended in a prescribed direction from one end side to the other with prescribed width; at least a pair of vibration arms (21) extended in a prescribed direction from one end side of the base part; and the support arm (40) that is extended in a width direction between one end side and the other end side of the base part and is extended in a prescribed direction outside the vibration arm; and a bonding region (26) formed at the tip of the support arm for mounting. The tip of the support arm is not extended as compared with the position of the tip of the vibration arm, and the shaft length (SL) of the support arm is more extended as compared with length from the base part of the vibration arm to the tip.

COPYRIGHT: (C)2009,JPO&INPIT