| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser beam machining device which can easily reduce a manufacturing cost of a micro device and can easily enhance the quality of the micro device. <P>SOLUTION: The laser beam machining device comprises an ultra-short pulse laser beam oscillation device 10, a condenser lens 40, a work mounting table 42, a first optical shutter device 20 for allowing a prescribed pulse number of the ultra-short pulse laser beam L to intermittently pass therethrough by rotating a rotary plate 22 at a high speed, a second optical shutter device 32 having a function to shut off the ultra-short pulse laser beam L for a prescribed period longer than that taken when the rotary plate 22 rotates once, and a synchronous control unit having a function to control the optical shutter actions of both the first and second optical shutter devices 20, 32, synchronized with the output timing of the ultra-short pulse laser beam L from the ultra-short pulse laser beam oscillation device 10. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
