发明名称 NONVOLATILE SEMICONDUCTOR STORAGE DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a nonvolatile semiconductor storage device equipped with a selection transistor allowing the threshold voltage of the selection transistor to be set sufficiently high, and having an excellent cutoff characteristic. SOLUTION: The nonvolatile semiconductor storage device includes a first lamination part 110 and a second lamination part 120. The first lamination part 110 includes a block insulating layer 113, a charge storage layer 114, and an n-type semiconductor layer 116 formed in contact with a sidewall of a tunnel insulating layer 115. The second lamination layer 120 includes a p-type semiconductor layer 125 formed in contact with a sidewall of a gate insulating layer 124. COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2009164485(A) 申请公布日期 2009.07.23
申请号 JP20080002579 申请日期 2008.01.09
申请人 TOSHIBA CORP 发明人 NITTA HIROYUKI
分类号 H01L21/8247;H01L27/115;H01L29/788;H01L29/792 主分类号 H01L21/8247
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